Online MOS Capacitor Characterization in LabVIEW Environment
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| Title | Online MOS Capacitor Characterization in LabVIEW Environment |
| Authors | |
| Abstract | We present an automated evaluation procedure to characterize MOS capacitors involving high-k gate dielectrics. Suitability of LabVIEW environment for online web-based semiconductor device characterization is demonstrated. Developed algorithms have been successfully applied to automate the MOS capacitor measurements for Capacitance-Voltage, Conductance-Voltage and Current-Voltage characteristics. Implementation of the algorithm for use as a remote internet-based characterization tool where the client and server communicate with each other via web services is also shown. |
| Publisher | kassel university press GmbH |
| Date | 2009-07-30 |
| Source | 1868-1646 |
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