Structure, Properties and Applications of Diamond Like Nanocomposite (SiOx Containing DLC) Films: A Review
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| Title | Structure, Properties and Applications of Diamond Like Nanocomposite (SiOx Containing DLC) Films: A Review |
| Authors | |
| Abstract | The present article reviews current situation on SiOx containing diamond like carbon (diamond like nanocomposite) films. The overview of different deposition methods and reagents used is presented; chemical composition of different diamond like nanocomposite films is described. Different models of structure of diamond like nanocomposite films are considered. Mechanical, optical, electrical properties as well as surface energy of diamond like nanocomposite films produced by different methods are reviewed and discussed. The survey of different potential and industrial applications of diamond like nanocomposite films is presented.http://dx.doi.org/10.5755/j01.ms.17.4.770 |
| Publisher | Kaunas University of Technology |
| Date | 2011-11-24 |
| Source | Medžiagotyra Vol 17, No 4 (2011) |
| Rights | Copyright terms are indicated in the Republic of Lithuania Law on Copyright and Related Rights, Articles 4-37. The copyright for articles in this journal are retained by the author(s), with first publication rights granted to the journal. By virtue of their appearance in this open access journal, articles are free to use with proper attribution in educational and other non-commercial settings. |